Low-crosstalk 10-GHz-spaced 512-channel arrayed-waveguide grating multi/demultiplexer fabricated on a 4-in wafer

Author

Takada, K. ; Abe, M. ; Shibata, M. ; Ishii, M. ; Okamoto, K.

Author_Institution

Photonics Labs., NTT Corp., Ibaraki, Japan

Volume

13

Issue

11

fYear

2001

Firstpage

1182

Lastpage

1184

Abstract

We report a 10-GHz-spaced 512-channel arrayed-waveguide grating (AWG) multi/demultiplexer fabricated on a 4-in wafer. We achieved this by folding the 7-cm-long slab waveguides of a conventionally configured AWG, so that the whole configuration was contained in the wafer and then attached reflecting mirrors at the folded parts. Phase compensation of the fabricated AWG was performed by means of ultraviolet irradiation through a metal mask.

Keywords

compensation; demultiplexing equipment; diffraction gratings; masks; multiplexing equipment; optical arrays; optical crosstalk; optical fabrication; optical planar waveguides; telecommunication channels; 4 in; 4-in wafer; 7 cm; folded parts; low-crosstalk arrayed-waveguide grating multi/demultiplexer; metal mask; optical fabrication; phase compensation; reflecting mirrors; slab waveguides; ultraviolet irradiation; Arrayed waveguide gratings; Mirrors; Optical arrays; Optical planar waveguides; Optical surface waves; Optical waveguides; Phased arrays; Planar waveguides; Slabs; Tellurium;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.959357

Filename

959357