Title :
Low-crosstalk 10-GHz-spaced 512-channel arrayed-waveguide grating multi/demultiplexer fabricated on a 4-in wafer
Author :
Takada, K. ; Abe, M. ; Shibata, M. ; Ishii, M. ; Okamoto, K.
Author_Institution :
Photonics Labs., NTT Corp., Ibaraki, Japan
Abstract :
We report a 10-GHz-spaced 512-channel arrayed-waveguide grating (AWG) multi/demultiplexer fabricated on a 4-in wafer. We achieved this by folding the 7-cm-long slab waveguides of a conventionally configured AWG, so that the whole configuration was contained in the wafer and then attached reflecting mirrors at the folded parts. Phase compensation of the fabricated AWG was performed by means of ultraviolet irradiation through a metal mask.
Keywords :
compensation; demultiplexing equipment; diffraction gratings; masks; multiplexing equipment; optical arrays; optical crosstalk; optical fabrication; optical planar waveguides; telecommunication channels; 4 in; 4-in wafer; 7 cm; folded parts; low-crosstalk arrayed-waveguide grating multi/demultiplexer; metal mask; optical fabrication; phase compensation; reflecting mirrors; slab waveguides; ultraviolet irradiation; Arrayed waveguide gratings; Mirrors; Optical arrays; Optical planar waveguides; Optical surface waves; Optical waveguides; Phased arrays; Planar waveguides; Slabs; Tellurium;
Journal_Title :
Photonics Technology Letters, IEEE