DocumentCode
1543709
Title
Excimer laser ablation and etching
Author
Brannon, James
Author_Institution
IBM Almaden Res. Center, San Jose, CA, USA
Volume
13
Issue
2
fYear
1997
fDate
3/1/1997 12:00:00 AM
Firstpage
11
Lastpage
18
Abstract
Today, excimer laser ablation and etching techniques have found use in applications ranging from semiconductor processing to correcting human vision problems. This article discusses these techniques, as well as some relevant engineering issues. The progress of excimer lasers in patterning technology is briefly presented, and the article concludes by discussing several applications of ablation and etching that have high potential industrial use and significance
Keywords
etching; excimer lasers; laser ablation; laser beam etching; laser materials processing; excimer laser ablation; excimer laser etching; human vision correction; industrial applications; patterning technology; semiconductor processing; Etching; Gas lasers; Laser ablation; Laser beam cutting; Optical materials; Optical pulses; Pulsed laser deposition; Semiconductor lasers; Solid lasers; Surface emitting lasers;
fLanguage
English
Journal_Title
Circuits and Devices Magazine, IEEE
Publisher
ieee
ISSN
8755-3996
Type
jour
DOI
10.1109/101.583607
Filename
583607
Link To Document