Title :
A system for the dynamic characterization of microstructures
Author :
Burdess, James S. ; Harris, Alun J. ; Wood, David ; Pitcher, Robert J. ; Glennie, David
Author_Institution :
Dept. of Mech. Eng., Newcastle upon Tyne Univ., UK
fDate :
12/1/1997 12:00:00 AM
Abstract :
This paper describes a fully automated measurement system designed to evaluate the dynamic characteristics of micromechanical structures (millimeter dimensions). To validate the system, vibration measurements have been carried on two structures-a micromachined silicon cantilever and bridge-and the results are presented. Out-of-plane measurements show that for the cantilever, both the mode shapes and resonant frequencies agree with beam theory predictions. However, for the bridge structure, tension due to boron doping causes a change from beam-like behavior and a more complex model is required. Mode-shapes natural frequencies and modal damping are determined from data obtained by vibrating the structures using a piezoelectric mounting system and deriving the transfer function between the piezodrive voltage and beam vibrational velocity
Keywords :
automatic test equipment; measurement by laser beam; micromechanical devices; vibration measurement; B doping; MEMS; Si; automated measurement system; beam theory predictions; beam vibrational velocity; dynamic characterization; laser vibrometer; micromachined Si bridge; micromachined Si cantilever; micromechanical structures; microstructures; modal damping; mode shapes; natural frequencies; out-of-plane measurements; piezodrive voltage; piezoelectric mounting system; resonant frequencies; transfer function; vibration measurements; Boron; Bridge circuits; Frequency measurement; Micromechanical devices; Microstructure; Resonant frequency; Shape measurement; Silicon; Structural beams; Vibration measurement;
Journal_Title :
Microelectromechanical Systems, Journal of
