A system for the dynamic characterization of microstructures

Author

Burdess, James S. ; Harris, Alun J. ; Wood, David ; Pitcher, Robert J. ; Glennie, David

Author_Institution

Dept. of Mech. Eng., Newcastle upon Tyne Univ., UK

Volume

6

Issue

4

fYear

1997

fDate

12/1/1997 12:00:00 AM

Firstpage

322

Lastpage

328

Abstract

This paper describes a fully automated measurement system designed to evaluate the dynamic characteristics of micromechanical structures (millimeter dimensions). To validate the system, vibration measurements have been carried on two structures-a micromachined silicon cantilever and bridge-and the results are presented. Out-of-plane measurements show that for the cantilever, both the mode shapes and resonant frequencies agree with beam theory predictions. However, for the bridge structure, tension due to boron doping causes a change from beam-like behavior and a more complex model is required. Mode-shapes natural frequencies and modal damping are determined from data obtained by vibrating the structures using a piezoelectric mounting system and deriving the transfer function between the piezodrive voltage and beam vibrational velocity

Keywords

automatic test equipment; measurement by laser beam; micromechanical devices; vibration measurement; B doping; MEMS; Si; automated measurement system; beam theory predictions; beam vibrational velocity; dynamic characterization; laser vibrometer; micromachined Si bridge; micromachined Si cantilever; micromechanical structures; microstructures; modal damping; mode shapes; natural frequencies; out-of-plane measurements; piezodrive voltage; piezoelectric mounting system; resonant frequencies; transfer function; vibration measurements; Boron; Bridge circuits; Frequency measurement; Micromechanical devices; Microstructure; Resonant frequency; Shape measurement; Silicon; Structural beams; Vibration measurement;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.650129

Filename

650129