Title :
A Millimeter-Tunable-Range Microlens for Endoscopic Biomedical Imaging Applications
Author :
Wu, Lei ; Xie, Huikai
Author_Institution :
WiOptix, Inc., Gainesville, FL, USA
Abstract :
We report an electrothermally-actuated microlens scanner that is suitable for biomedical imaging applications. The microlens has a large tunable range and a low driving voltage, and the lens is made of glass. The enabling device is a new electrothermal actuator design that is capable of large vertical actuation (~0.9 mm) on a 3 mm device footprint, with small lateral shift (<; 7 μm) and tilting (<; 0.38°) at less than 4-V. The design, fabrication and characterization of the actuator are presented. Imaging results by the assembled microlens are also demonstrated.
Keywords :
biomedical imaging; endoscopes; microlenses; optical fabrication; electrothermal actuator design; electrothermally-actuated microlens scanner; endoscopic biomedical imaging; lateral shift; millimeter-tunable-range microlens; Actuators; Biomedical imaging; Biomedical optical imaging; Electrothermal effects; High-resolution imaging; Lenses; Microoptics; Optical imaging; Optical microscopy; Probes; Confocal microscopy; electrothermal bimorph; large vertical displacement; lateral shift free; optical coherence microscopy; tunable microlens;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.2010.2048304
