• DocumentCode
    1545649
  • Title

    Lithographic technology for microwave integrated circuits

  • Author

    Shepherd, P.R. ; Evans, P.S.A. ; Ramsey, B.J. ; Harrison, D.J.

  • Author_Institution
    Sch. of Electron. & Electr. Eng., Bath Univ., UK
  • Volume
    33
  • Issue
    6
  • fYear
    1997
  • fDate
    3/13/1997 12:00:00 AM
  • Firstpage
    483
  • Lastpage
    484
  • Abstract
    Conductive lithographic films (CLFs) have been developed primarily as substitutes for resin/laminate boards, which share properties with the metallisation patterns used in planar microwave integrated circuits (MICs). The authors examine the microwave properties of the films and show that, although the losses are greater, they have potential as an alternative to the traditional manufacturing process of MICs
  • Keywords
    integrated circuit metallisation; lithography; microwave integrated circuits; conductive lithographic film; loss; manufacturing; metallisation; planar microwave integrated circuit;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19970360
  • Filename
    585055
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1545649