Title :
Yield theory for diode laser fabrication
Author :
Wu, Y.A. ; Chang-Hasnain, C.J.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
fDate :
3/13/1997 12:00:00 AM
Abstract :
A novel yield model is derived and is shown to agree extremely well with experimental data. It provides an accurate tool with physical insights to obtain yield distribution and to determine the number of key quality limiting factors for future improvements
Keywords :
quality control; semiconductor device manufacture; semiconductor device models; semiconductor lasers; surface emitting lasers; VCSELs; diode laser fabrication; physical insights; quality limiting factors; yield distribution; yield model;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19970352
