DocumentCode
1545803
Title
Vapour phase proton-exchange: technique for waveguide fabrication in LiNbO3
Author
Masalkar, P.J. ; Fujimura, M. ; Suhara, T. ; Nishihara, H.
Author_Institution
Dept. of Electron. Eng., Osaka Univ., Japan
Volume
33
Issue
6
fYear
1997
fDate
3/13/1997 12:00:00 AM
Firstpage
519
Lastpage
520
Abstract
The authors report a novel process for the fabrication of optical waveguides in lithium niobate using single-step proton-exchange from vapour-phase benzoic acid. Planar and channel waveguides were fabricated
Keywords
ion exchange; lithium compounds; optical fabrication; optical planar waveguides; optical waveguides; LiNbO3; channel waveguides; optical waveguides; planar waveguides; single-step proton-exchange; vapour phase proton-exchange technique; vapour-phase benzoic acid; waveguide fabrication;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19970339
Filename
585078
Link To Document