Title :
Vapour phase proton-exchange: technique for waveguide fabrication in LiNbO3
Author :
Masalkar, P.J. ; Fujimura, M. ; Suhara, T. ; Nishihara, H.
Author_Institution :
Dept. of Electron. Eng., Osaka Univ., Japan
fDate :
3/13/1997 12:00:00 AM
Abstract :
The authors report a novel process for the fabrication of optical waveguides in lithium niobate using single-step proton-exchange from vapour-phase benzoic acid. Planar and channel waveguides were fabricated
Keywords :
ion exchange; lithium compounds; optical fabrication; optical planar waveguides; optical waveguides; LiNbO3; channel waveguides; optical waveguides; planar waveguides; single-step proton-exchange; vapour phase proton-exchange technique; vapour-phase benzoic acid; waveguide fabrication;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19970339
