• DocumentCode
    1545803
  • Title

    Vapour phase proton-exchange: technique for waveguide fabrication in LiNbO3

  • Author

    Masalkar, P.J. ; Fujimura, M. ; Suhara, T. ; Nishihara, H.

  • Author_Institution
    Dept. of Electron. Eng., Osaka Univ., Japan
  • Volume
    33
  • Issue
    6
  • fYear
    1997
  • fDate
    3/13/1997 12:00:00 AM
  • Firstpage
    519
  • Lastpage
    520
  • Abstract
    The authors report a novel process for the fabrication of optical waveguides in lithium niobate using single-step proton-exchange from vapour-phase benzoic acid. Planar and channel waveguides were fabricated
  • Keywords
    ion exchange; lithium compounds; optical fabrication; optical planar waveguides; optical waveguides; LiNbO3; channel waveguides; optical waveguides; planar waveguides; single-step proton-exchange; vapour phase proton-exchange technique; vapour-phase benzoic acid; waveguide fabrication;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19970339
  • Filename
    585078