Title :
Integrated micro-opto-mechanical vibration sensor connected to optical fibres
Author :
Ollier, E. ; Labeye, P. ; Mottier, P.
Author_Institution :
Dept. de Microtechnol., CEA, Grenoble, France
fDate :
3/13/1997 12:00:00 AM
Abstract :
A new micro-optical vibration sensor has been realised by combining `integrated optics´ and `micromachining´ with silicon technologies. The high sensitivity and the wide frequency range have been obtained using a multimode section in the optical detection circuit. Three prototypes have been installed successfully in an industrial hydroelectric power plant
Keywords :
fibre optic sensors; integrated optics; micromachining; microsensors; vibration measurement; industrial hydroelectric power plant; integrated micro-opto-mechanical vibration sensor; integrated optics; micromachining; multimode optical detection circuit; optical fibre; silicon technology;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19970354
