Title :
Piezoelectric MEMS low-level vibration energy harvester with PMN-PT single crystal cantilever
Author :
Tang, Gongguo ; Liu, Jing-Quan ; yang, Bo ; Luo, J.-B. ; Liu, H.-S. ; Li, Y.-G. ; Yang, Chun-Sheng ; Dao, V.-D. ; Tanaka, Kiyoshi ; Sugiyama, Shunsuke
Author_Institution :
Res. Inst. of Micro/Nano Sci. & Technol., Shanghai Jiao Tong Univ., Shanghai, China
Abstract :
A piezoelectric MEMS vibration energy harvester with PMN-PT single material has been developed, which can convert low-level vibration energy into electrical energy. Compared with the conventional piezoelectric material, the PMN-PT single crystal has a higher coupling coefficient and electromechanical coefficient, which can improve the conversion efficiency of the power generating device. The designed device consists of a composite cantilever beam and an Ni proof mass, which is fabricated using UV-LIGA technology. Test results show that the fabricated vibration energy harvester can generate a maximum output power of 2.704 W with a 2.08 VP-P output voltage, at a resonant frequency of 237.4 Hz and 1.0g acceleration level.
Keywords :
LIGA; cantilevers; energy harvesting; microfabrication; microsensors; piezoelectric materials; piezoelectric transducers; vibrations; PMN-PT single crystal cantilever; UV-LIGA technology; composite cantilever beam; coupling coefficient; electrical energy; electromechanical coefficient; frequency 237.4 Hz; low-level vibration energy; nickel proof mass; piezoelectric MEMS low-level vibration energy harvester; piezoelectric material; power 2.704 W; power generating device; resonant frequency; voltage 2.08 V;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2012.1419
