DocumentCode
1546088
Title
Theoretical study of surface acoustic waves in (n11) GaAs-cuts
Author
Zhang, Victor ; Lefebvre, Jean-Etienne ; Gryba, Tadeusz
Author_Institution
CNRS, Villeneuve d´´Ascq, France
Volume
44
Issue
2
fYear
1997
fDate
3/1/1997 12:00:00 AM
Firstpage
406
Lastpage
416
Abstract
The propagation characteristics of true and leaky or pseudo surface acoustic waves (TSAW and PSAW=LSAW) on (n11) GaAs-cuts, n=1, 2, 3 and 4, are theoretically calculated as a function of propagation direction. They include phase velocity (V), electromechanical coupling constant (K/sup 2/), and attenuation factor (/spl alpha/) of wave propagation on a metallized surface. The results show that PSAW mode velocities are significantly higher than corresponding TSAW velocities, and for certain propagation directions the attenuation factor is extremely small (10/sup -5/ dB//spl lambda/). Highly coupled PSAW modes exist for propagation directions where the TSAW are very poorly coupled. For certain isolated directions, attenuation of the wave is null (/spl alpha/=0), PSAW becoming a non-leaky SAW with partial polarization. And in this case the corresponding TSAW are decoupled from the surface electric excitation. Analysis of relations between various modes (TSAW, PSAW and SSBW, surface skimming bulk wave) is made with the help of the effective surface permittivity function and the generalized slowness diagram. A coupling constant definition different from the usual 2/spl Delta/V/V is used, its validity and application conditions are discussed.
Keywords
III-V semiconductors; acoustic materials; gallium arsenide; piezoelectric semiconductors; surface acoustic waves; (n11) GaAs cut; GaAs; LSAW mode; PSAW mode; SSBW mode; TSAW mode; attenuation factor; effective surface permittivity; electromechanical coupling constant; generalized slowness diagram; leaky surface acoustic wave; metallized surface; phase velocity; pseudo surface acoustic wave; surface acoustic wave propagation; surface skimming bulk wave; true surface acoustic wave; Acoustic propagation; Acoustic waves; Attenuation; Electrostatic precipitators; Gallium arsenide; Optical attenuators; Optical signal processing; Optical surface waves; Substrates; Surface acoustic waves;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/58.585125
Filename
585125
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