DocumentCode
1546158
Title
SAW diffraction using the thin-element decomposition method
Author
Fagerholm, Juha ; Friberg, Ari T. ; Huttunen, Juhani ; Morgan, David P. ; Salomaa, Martti M.
Author_Institution
Center for Sci. Comput., Espoo, Finland
Volume
44
Issue
2
fYear
1997
fDate
3/1/1997 12:00:00 AM
Firstpage
505
Lastpage
514
Abstract
We adapt the angular spectrum of plane waves (ASPW) decomposition to numerical simulations of the diffraction of surface-acoustic waves (SAWs) on anisotropic model substrate, such as YZ lithium niobate. We utilize the thin-element decomposition (TED) method, appropriately modified for an anisotropic substrate; we also introduce a novel "average-wavenumber" variation of this scheme; these are numerically found to be mutually consistent. We apply the TED method to simulate wave propagation both in infinite periodic structures of metallized gratings and also in finite gratings. We demonstrate that the ASPW provides a convenient and numerically fast tool for precise diffraction calculations in practical SAW devices which also display structural variations in the lateral direction, perpendicular to the principal direction of wave propagation. Additionally, we compare the present TED method to waveguide theory in an analysis of the role of SAW reflections from the electrodes.
Keywords
acoustic wave diffraction; surface acoustic waves; LiNbO/sub 3/; SAW diffraction; YZ lithium niobate; angular spectrum of plane waves; anisotropic substrate; average-wavenumber; finite grating; metallized grating; numerical simulation; periodic structure; thin-element decomposition; Anisotropic magnetoresistance; Diffraction; Gratings; Lithium niobate; Metallization; Numerical simulation; Periodic structures; Surface acoustic wave devices; Surface acoustic waves; Surface waves;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/58.585135
Filename
585135
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