• DocumentCode
    1546158
  • Title

    SAW diffraction using the thin-element decomposition method

  • Author

    Fagerholm, Juha ; Friberg, Ari T. ; Huttunen, Juhani ; Morgan, David P. ; Salomaa, Martti M.

  • Author_Institution
    Center for Sci. Comput., Espoo, Finland
  • Volume
    44
  • Issue
    2
  • fYear
    1997
  • fDate
    3/1/1997 12:00:00 AM
  • Firstpage
    505
  • Lastpage
    514
  • Abstract
    We adapt the angular spectrum of plane waves (ASPW) decomposition to numerical simulations of the diffraction of surface-acoustic waves (SAWs) on anisotropic model substrate, such as YZ lithium niobate. We utilize the thin-element decomposition (TED) method, appropriately modified for an anisotropic substrate; we also introduce a novel "average-wavenumber" variation of this scheme; these are numerically found to be mutually consistent. We apply the TED method to simulate wave propagation both in infinite periodic structures of metallized gratings and also in finite gratings. We demonstrate that the ASPW provides a convenient and numerically fast tool for precise diffraction calculations in practical SAW devices which also display structural variations in the lateral direction, perpendicular to the principal direction of wave propagation. Additionally, we compare the present TED method to waveguide theory in an analysis of the role of SAW reflections from the electrodes.
  • Keywords
    acoustic wave diffraction; surface acoustic waves; LiNbO/sub 3/; SAW diffraction; YZ lithium niobate; angular spectrum of plane waves; anisotropic substrate; average-wavenumber; finite grating; metallized grating; numerical simulation; periodic structure; thin-element decomposition; Anisotropic magnetoresistance; Diffraction; Gratings; Lithium niobate; Metallization; Numerical simulation; Periodic structures; Surface acoustic wave devices; Surface acoustic waves; Surface waves;
  • fLanguage
    English
  • Journal_Title
    Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0885-3010
  • Type

    jour

  • DOI
    10.1109/58.585135
  • Filename
    585135