• DocumentCode
    1546240
  • Title

    Amorphous silicon thin-film transistors on compliant polyimide foil substrates

  • Author

    Gleskova, H. ; Wagner, S.

  • Author_Institution
    Dept. of Electr. Eng., Princeton Univ., NJ, USA
  • Volume
    20
  • Issue
    9
  • fYear
    1999
  • Firstpage
    473
  • Lastpage
    475
  • Abstract
    Much of the mechanical strain in semiconductor devices can be relieved when they are made on compliant substrates. We demonstrate this strain relief with amorphous silicon thin-film transistors made on 25-μm thick polyimide foil, which can be bent to radii of curvature R down to 0.5 mm without substantial change in electrical characteristics.
  • Keywords
    amorphous semiconductors; elemental semiconductors; foils; polymer films; silicon; substrates; thin film transistors; Si; amorphous silicon thin film transistor; compliant polyimide foil substrate; electrical characteristics; mechanical strain relief; radius of curvature; semiconductor device; Amorphous silicon; Capacitive sensors; Glass; Plasma temperature; Plastics; Polyimides; Sensor arrays; Silicon compounds; Substrates; Thin film transistors;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/55.784456
  • Filename
    784456