Microwave measurements of effective dielectric constant of semiconductor waveguides via periodic-structure photoexcitation

Author

Platte, Walter

Author_Institution

Inst. fur Hochfrequenztech. und Optoelektronik, Univ. der Bundeswehr Hamburg, Germany

Volume

46

Issue

3

fYear

1997

fDate

6/1/1997 12:00:00 AM

Firstpage

717

Lastpage

721

Abstract

In this paper a new method for measurements of the effective dielectric constant of layered or full-substrate semiconductor waveguides at microwave frequencies is presented. The light-induced generation of a photoconductivity grating within the excited waveguide section is utilized. Incoming swept-frequency signals produce a stop-band reflection spectrum which exhibits a dominant major-lobe peak value at the grating center frequency. The effective dielectric constant is calculated from a simple analytical expression by substituting the measured center frequency. Theoretical background, error estimation, and an example are presented

Keywords

microwave reflectometry; permittivity measurement; photoconducting devices; photoexcitation; planar waveguides; dominant major-lobe peak value; effective dielectric constant; error estimation; excited waveguide section; full-substrate semiconductor waveguides; grating center frequency; layered semiconductor waveguides; light-induced generation; measured center frequency; microwave frequencies; microwave measurement; periodic-structure photoexcitation; photoconductivity grating; semiconductor waveguides; stop-band reflection spectrum; swept-frequency signals; Dielectric constant; Dielectric measurements; Error analysis; Frequency measurement; Gratings; Microwave frequencies; Microwave measurements; Optical reflection; Photoconductivity; Semiconductor waveguides;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/19.585439

Filename

585439