In-situ monitoring during PLD of YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// using RHEED at high oxygen pressure

The surface morphology and initial growth of YBa/sub 2/Cu/sub 3/O/sub u-/spl delta//, using Pulsed Laser Deposition (PLD), have been subject to in many studies. Both, Scanning Probe Microscopy (SPM) as well as Reflection High Energy Electron Diffraction (RHEED) have been applied. The latter is mostly operated using modified deposition parameters, like a reduced oxygen pressure. Here, we have studied the initial growth using a PLD-RHEED system at standard PLD pressures. In this system, in-situ RHEED can be applied in a background pressure of oxygen up to 50 Pa. The initial growth of YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// on SrTiO/sub 3/ substrates is studied. The influence of the substrate termination, i.e., SrO or TiO/sub 2/, on the growth will be discussed.