DocumentCode :
1548226
Title :
Correction To "Scratch Drive Actuator With Mechanical Links For Self-assembly Of Three-dimensional MEMS"
Author :
Terunobu Akiyama ; Collard, Dominique ; Fujita, Hiroyuki
Author_Institution :
Institute of Industrial Science, The University of Tokyo
Volume :
6
Issue :
2
fYear :
1997
fDate :
6/1/1997 12:00:00 AM
Firstpage :
179
Lastpage :
179
Keywords :
Actuators; Laboratories; Self-assembly;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.1997.585796
Filename :
585796
Link To Document :
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