Fabrication of large area superconducting thin film by pulsed laser scanning

Author

Wang, Q.L. ; An, C.W. ; Song, W.D. ; Oh, S.S. ; Ryu, K.S. ; Jeong, D.Y.

Author_Institution

Nat. Lab. of Laser Technol., HUST, Wuhan, China

Volume

9

Issue

2

fYear

1999

fDate

6/1/1999 12:00:00 AM

Firstpage

2355

Lastpage

2358

Abstract

In order to deposit high quality high temperature superconducting (HTS) YBCO thin films with a large area, the pulsed laser scanning (PLS) method was tried and the thickness distribution of the film was investigated. Large area YBa/sub 2/Cu/sub 3/O/sub 7-x/ thin films on /spl phi/ 36 mm diameter LaAlO/sub 3/ and /spl phi/ 42 mm diameter Y-ZrO/sub 2/ (YSZ) single crystal substrates were obtained by rotating lenses with radii of 9 and 12.9 mm. The critical temperatures T/sub c/ of the films at the center and edge were all 90 K. The critical current density J/sub c/ at 77 K and zero magnetic field is over 10/sup 6/ A/cm/sup 2/. X-ray diffraction showed that the thin films are completely c-axis oriented. The V-I characteristics of the thin films were also investigated.

Keywords

X-ray diffraction; barium compounds; critical current density (superconductivity); high-temperature superconductors; pulsed laser deposition; superconducting thin films; superconducting transition temperature; yttrium compounds; 0 T; 77 K; I-V characteristics; LaAlO/sub 3/; X-ray diffraction; Y/sub 2/O/sub 3/ZrO/sub 2/; YBa/sub 2/Cu/sub 3/O/sub 7/; c-axis oriented films; critical current density; critical temperatures; large area superconducting thin film; pulsed laser scanning; single crystal substrates; thickness distribution; High temperature superconductors; Optical device fabrication; Optical pulses; Pulsed laser deposition; Sputtering; Superconducting films; Superconducting thin films; Temperature distribution; Transistors; Yttrium barium copper oxide;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/77.784944

Filename

784944