Author :
Zhitomirsky, Vladimir N. ; Zarchin, Oren ; Wang, She-Guan ; Boxman, Raymond L. ; Goldsmith, Samuel
Abstract :
A vacuum arc carbon plasma source is described, in which an arc was ignited between a cathode and an anode having In aperture, by bringing the two electrodes into contact, and parting them while current was flowing. The inter-electrode gap length was varied. A focusing magnetic field was applied in the inter-electrode gap, and a toroidal magnetic field was applied to guide plasma through a toroidal duct. The influence of the arc current (Iarc), gap length (L), and focusing magnetic field (Bf) on the cathode spot motion, plasma behavior, and output ion current was studied. It was shown that with Iarc=150-250 A and relatively weak Bf, the spots moved on the cathode periphery, causing noisy arcing and fluctuation of the output ion current, while at a lower Iarc (50-100 A) and strong Bf (⩾28 mT), there were fewer spots on the cathode surface, they tended to move toward the cathode center, the arc noise decreased and the average output ion current increased. With increasing L from 2 to 18 mm, the total ion current at first rapidly increased, and then saturated at L⩾10 mm. Best performance of the carbon plasma source was obtained with an arc current chosen so that with a given field configuration, the cathode spots locate in the center of the cathode surface, and with strong magnetic fields in both the electrode and toroidal filter regions
Keywords :
carbon; focusing; magnetic field effects; plasma production; vacuum arcs; 150 to 250 A; 2 nm to 18 mm; 28 mT; 50 to 100 A; anode; aperture; arc current; arc ignition; arcing; cathode periphery; cathode spot motion; cathode spots; fluctuation; focusing magnetic field; inter-electrode gap; inter-electrode gap length; ion current production; output ion current; plasma behavior; plasma measurements; super-hard coatings; thin amorphous diamond-like carbon films; toroidal duct; toroidal magnetic field; vacuum arc C plasma source; Anodes; Apertures; Cathodes; Ducts; Electrodes; Fluctuations; Magnetic separation; Plasma sources; Toroidal magnetic fields; Vacuum arcs;