Characteristics of Extended Nonthermal Plasma Source Based on a One-Dimensional DBD in a Narrow Gap of 100–200 $\\mu\\hbox {m}$

Author

Akishev, Yuri ; Grushin, Mikhail ; Karalnik, Vladimir ; Petryakov, Alex ; Supiot, Philippe ; Trushkin, Nikolay

Author_Institution

State Res. Center, Russian Federation Troitsk Inst. of Innovative & Thermonucl. Res., Troitsk, Russia

Volume

39

Issue

11

fYear

2011

Firstpage

2110

Lastpage

2111

Abstract

An extended 1-D dielectric-barrier discharge (DBD) in a very narrow gap generates nonthermal microplasma at higher pressure and is attractive for surface technologies in that the predefined volumes with submillimeter linear dimensions can be locally activated and treated. Such a discharge has been designed with the use of a thin blade placed very closely over a plane-barrier electrode. The search on the characteristics of the linear DBD in He powered by midfrequency alternating-current voltages is performed. The images of microplasma properties typical for this reactor are presented.

Keywords

helium; plasma chemistry; plasma diagnostics; surface discharges; He; dielectric-barrier discharge; extended nonthermal plasma source; microplasma properties; midfrequency alternating-current voltages; nonthermal microplasma; one-dimensional DBD; plane-barrier electrode; size 100 mum to 200 mum; surface technologies; thin blade; Blades; Discharges; Electrodes; Helium; Inductors; Surface discharges; Temperature measurement; Plasma applications; plasma chemistry; plasma devices; plasma diagnostics; plasma sources;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2011.2148731

Filename

5871332