• DocumentCode
    155031
  • Title

    Apparatus for measuring the capacitance-voltage characteristics of semiconductor devices with an extended frequency range

  • Author

    Sergeev, V.A. ; Frolov, I.V. ; Mukhometzianov, R.N.

  • Author_Institution
    Ulyanovsk Branch, Kotel´nikov Inst. of Radio Eng. & Electron., Ulyanovsk, Russia
  • Volume
    2
  • fYear
    2014
  • fDate
    25-26 Sept. 2014
  • Firstpage
    181
  • Lastpage
    182
  • Abstract
    An upgraded automated installation for higher capacity resolution measuring the capacitance-voltage characteristics of semiconductor devices is described. The system is based on the principle of converting the measured capacitance to the frequency of the LC generator. Measurement capacity is in the range of three frequencies: 100 kHz, 500 kHz, 1 MHz.
  • Keywords
    capacitance measurement; semiconductor device measurement; voltage measurement; LC generator; capacitance-voltage characteristics; extended frequency range; frequency 1 MHz; frequency 100 kHz; frequency 500 kHz; semiconductor devices; Capacitance; Capacitance measurement; Capacitance-voltage characteristics; Electronic mail; Frequency measurement; Semiconductor device measurement; Semiconductor devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Actual Problems of Electron Devices Engineering (APEDE), 2014 International Conference on
  • Conference_Location
    Saratov
  • Print_ISBN
    978-1-4799-3437-9
  • Type

    conf

  • DOI
    10.1109/APEDE.2014.6958239
  • Filename
    6958239