DocumentCode
155031
Title
Apparatus for measuring the capacitance-voltage characteristics of semiconductor devices with an extended frequency range
Author
Sergeev, V.A. ; Frolov, I.V. ; Mukhometzianov, R.N.
Author_Institution
Ulyanovsk Branch, Kotel´nikov Inst. of Radio Eng. & Electron., Ulyanovsk, Russia
Volume
2
fYear
2014
fDate
25-26 Sept. 2014
Firstpage
181
Lastpage
182
Abstract
An upgraded automated installation for higher capacity resolution measuring the capacitance-voltage characteristics of semiconductor devices is described. The system is based on the principle of converting the measured capacitance to the frequency of the LC generator. Measurement capacity is in the range of three frequencies: 100 kHz, 500 kHz, 1 MHz.
Keywords
capacitance measurement; semiconductor device measurement; voltage measurement; LC generator; capacitance-voltage characteristics; extended frequency range; frequency 1 MHz; frequency 100 kHz; frequency 500 kHz; semiconductor devices; Capacitance; Capacitance measurement; Capacitance-voltage characteristics; Electronic mail; Frequency measurement; Semiconductor device measurement; Semiconductor devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Actual Problems of Electron Devices Engineering (APEDE), 2014 International Conference on
Conference_Location
Saratov
Print_ISBN
978-1-4799-3437-9
Type
conf
DOI
10.1109/APEDE.2014.6958239
Filename
6958239
Link To Document