Title :
Effects of low temperature plasma surface complex profiles (Physical and mathematical aspects)
Author :
Brzhozovsky, B.M. ; Zinina, H.P. ; Martynov, V.V.
Abstract :
The basic aspects of the impact of low-temperature plasma combined discharge to surface-complex to justify conditions for increasing their strength and durability.
Keywords :
durability; mechanical strength; plasma materials processing; plasma-wall interactions; surface treatment; low temperature plasma; plasma impact; plasma surface complex profiles; surface durability; surface strength; Discharges (electric); Educational institutions; Electronic mail; Niobium; Plasma temperature; Surface discharges;
Conference_Titel :
Actual Problems of Electron Devices Engineering (APEDE), 2014 International Conference on
Conference_Location :
Saratov
Print_ISBN :
978-1-4799-3437-9
DOI :
10.1109/APEDE.2014.6958252
