Title :
Electrothermal degradation of systems of metallization at non-stationary current influences
Author :
Skvortsov, A.A. ; Zuev, S.M. ; Koryachko, M.V.
Author_Institution :
Moscow State Univ. of Mech. Eng. (MAMI), Moscow, Russia
Abstract :
In work degradation of systems of metallization on the basis of aluminum is considered at influence of impulses of current triangular and squared. It is revealed that the degradatsionny processes connected about formation of melted zones are registered an oscillographic method. Comparison the degradatsionnykh of processes in systems of metallization of various geometry is carried out. Work is performed with support of grants of the Russian Fond Basic Research No 12-07-00620-a and No 14-07-0086914-a, as project No 2014/85 (a project code 2290).
Keywords :
metallisation; oscillations; thermal analysis; No 14-07-0086914-a; Russian Fond Basic Research No 12-07-00620-a; aluminum; electrochemical degradation; melted zones; metallization systems; nonstationary current influences; oscillographic method; work degradation; Aluminum; Chemical vapor deposition; Degradation; Materials; Metallization; Microelectronics; Reliability;
Conference_Titel :
Actual Problems of Electron Devices Engineering (APEDE), 2014 International Conference on
Conference_Location :
Saratov
Print_ISBN :
978-1-4799-3437-9
DOI :
10.1109/APEDE.2014.6958273