Title :
A surface-micromachined resonant-beam pressure-sensing structure
Author :
Melvås, Patrik ; Kälvesten, Edvard ; Stemme, Göran
Author_Institution :
Dept. of Signals, Sensors & Syst., R. Inst. of Technol., Stockholm, Sweden
fDate :
12/1/2001 12:00:00 AM
Abstract :
The first study on an entirely surface-micromachined resonant-beam pressure sensor is presented. Using a fully surface-micromachined process, an encapsulated beam resonant pressure-sensor structure with a pressure-sensitive diaphragm of 100×150×2 μm has been fabricated. The resonating beam is fully enclosed inside the reference vacuum cavity formed beneath the diaphragm. The new design enables high pressure sensitivity and a miniature chip size, essential for sensors such as catheter-mounted intravascular blood pressure sensors. The pressure sensitivity is measured at 3.2%/bar with a beam resonance frequency of about 700 kHz
Keywords :
blood pressure measurement; micromachining; microsensors; pressure sensors; 100 micron; 150 micron; 2 micron; 700 kHz; catheter-mounted intravascular blood pressure sensors; high pressure sensitivity; miniature chip size; pressure-sensitive diaphragm; resonating beam; surface-micromachined resonant-beam pressure-sensing structure; Catheters; Force measurement; Optical interferometry; Optical resonators; Optical sensors; Piezoresistance; Pressure measurement; Resonance; Semiconductor device measurement; Sensor phenomena and characterization;
Journal_Title :
Microelectromechanical Systems, Journal of
