Batch-processed vacuum-sealed capacitive pressure sensors

Author

Chavan, Abhijeet V. ; Wise, Kensall D.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA

Volume

10

Issue

4

fYear

2001

fDate

12/1/2001 12:00:00 AM

Firstpage

580

Lastpage

588

Abstract

This paper reports two multitransducer vacuum-sealed capacitive barometric pressure sensors, one using single-lead and the other using multiple-leads to transfer the electrical signal out of the vacuum-sealed reference cavity. The first device operates with a resolution of 37 mtorr over a pressure range from 600 to 800 torr. The sensitivity is 27 fF/torr (3000 ppm/torr). The TCO at 750 torr is 3900 ppm/°C and the TCS is 1000 ppm/°C. The second device has a resolution of 25 mtorr over a range from 500 to 800 torr, with individual transducer sensitivity of 39 fF/torr. The TCO at 750 torr is 1350 ppm/°C and TCS is 1000 ppm/°C. Both devices have an on-chip compensation capacitor and are read out using an electronically-trimmed switched-capacitor charge integrator

Keywords

capacitive sensors; microsensors; pressure sensors; 500 to 800 torr; 600 to 800 torr; 750 torr; batch-processed vacuum-sealed capacitive pressure sensors; electronically-trimmed switched-capacitor charge integrator; multitransducer vacuum-sealed capacitive barometric pressure sensors; sensitivity; transducer sensitivity; Capacitive sensors; Capacitors; Electrodes; Glass; Ocean temperature; Seals; Silicon; Temperature distribution; Temperature sensors; Wafer bonding;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.967381

Filename

967381