Title :
Characterization of micromechanical optical modulator
Author :
Mao, Huibing ; Ke, Jinghua ; Xing, Peisheng ; Lai, Zongsheng
Author_Institution :
Dept. of Electron. Sci. & Technol., East China Normal Univ., Shanghai, China
fDate :
12/1/2001 12:00:00 AM
Abstract :
In this paper, a Fabry-Perot optical modulator fabricated by surface micromechanical technique is presented. The modulator is optimized for a wavelength of 1.3 μm and is intended for a fiber-to-the-home system. The actuation voltage of the modulator is measured to be 10-25 V. The optical modulator has a series of resonant frequencies determined from the device structure. When the modulator is driven by a sinusoidal signal, the output frequency will be doubled. For a driving signal greater than a certain value, the oscillation amplitude of the membrane will exceed λ/4, resulting in an ultrasaturation phenomenon
Keywords :
Fabry-Perot resonators; micro-optics; micromechanical devices; optical modulation; 1.3 micron; 10 to 25 V; Fabry-Perot optical modulator; actuation voltage; device structure; driving signal; fiber-to-the-home system; micromechanical optical modulator; optical modulator; resonant frequencies; surface micromechanical technique; ultrasaturation phenomenon; Fabry-Perot; Frequency measurement; Micromechanical devices; Optical devices; Optical fiber devices; Optical modulation; Optical surface waves; Resonant frequency; Voltage; Wavelength measurement;
Journal_Title :
Microelectromechanical Systems, Journal of
