A 1.5-V-supplied CMOS ASIC for the actuation of an electrostatic micromotor

Author

Favrat, Pierre ; Parat, Lionel ; Ballan, Hussein ; Declercq, Michel J. ; de Rooij, Nico F.

Author_Institution

Electron. Lab., Swiss Federal Inst. of Technol., Lausanne, Switzerland

Volume

2

Issue

3

fYear

1997

fDate

9/1/1997 12:00:00 AM

Firstpage

153

Lastpage

160

Abstract

The use of electrostatic forces in micromechanical systems is well known, but quite high voltages are needed to produce usable forces. In this perspective paper, a 1.5-V battery-supplied integrated circuit able to drive an electrostatic micromotor is presented. The application-specific integrated circuit (ASIC) can output signals up to 80 V, with low-voltage controlling signals. It is especially designed for portable (wristwatch-like) applications. High voltage can be produced by either switching or charge-pumping power supplies

Keywords

CMOS integrated circuits; application specific integrated circuits; electrostatic devices; microactuators; micromotors; power integrated circuits; 1.5 V; 80 V; CMOS ASIC; actuation; electrostatic micromotor; high voltage integrated circuit; low-voltage control signal; micromechanical system; portable applications; Application specific integrated circuits; Associate members; CMOS process; CMOS technology; Electrostatics; Integrated circuit technology; Micromechanical devices; Micromotors; Stators; Voltage;

fLanguage

English

Journal_Title

Mechatronics, IEEE/ASME Transactions on

Publisher

ieee

ISSN

1083-4435

Type

jour

DOI

10.1109/3516.622967

Filename

622967