An autofocusing measurement system with a piezoelectric translator

Author

Zhang, Ji-hua ; Cai, Lilong

Author_Institution

Dept. of Mech. Eng., Hong Kong Univ., Hong Kong

Volume

2

Issue

3

fYear

1997

fDate

9/1/1997 12:00:00 AM

Firstpage

213

Lastpage

216

Abstract

An autofocusing system that consists of a compact disc (CD) optical head and a piezoelectric translator (PZT) is developed for measuring the displacement or profile of a tested surface. The displacement or the profile of the tested surface can be obtained with varying accuracy by measuring the curve of the driving voltage to the expansion distance of the PZT or by using a secondary sensing device of displacement. The resolution of the system can reach 10 nm and the accuracy is 0.05 μm. Some design considerations, such as the control algorithm of the focus servo and error analysis of the system, are addressed in this paper

Keywords

error analysis; feedback; lead compounds; measurement by laser beam; optical self-focusing; photodetectors; piezoceramics; servomechanisms; spatial variables measurement; compact disc optical head; error analysis; feedback; laser autofocusing system; optical transducer; piezoelectric translator; servomechanism; Actuators; Displacement measurement; Laser feedback; Microscopy; Optical feedback; Optical fiber devices; Optical fiber sensors; Optical interferometry; Optical sensors; Surface structures;

fLanguage

English

Journal_Title

Mechatronics, IEEE/ASME Transactions on

Publisher

ieee

ISSN

1083-4435

Type

jour

DOI

10.1109/3516.622974

Filename

622974