DocumentCode :
1551330
Title :
AC/DC characterization of NMOS and PMOS hot-carrier-induced degradation under AC/DC stress
Author :
Dawes, Mary ; Alavi, Mohsen ; Kim, Dae M.
Author_Institution :
Intel Corp., Hillsboro, OR, USA
Volume :
37
Issue :
11
fYear :
1990
fDate :
11/1/1990 12:00:00 AM
Firstpage :
2416
Lastpage :
2419
Abstract :
The AC/DC measurements of NMOS and PMOS Idsat shifts are compared following DC stress. The results of the I dsat shifts are found to be the same. The AC Idsat measurements were performed under a variety of different conditions (varying frequency, amplitude, and base level) and showed that hot-carrier-induced interfaced states are shallow and fast (<20 ns). AC versus DC stressing was also examined. In PMOS devices, pulsed drain stress was found to be generally quasi-static, while pulsed gate stress produced enhanced device degradation under certain bias conditions. In NMOS transistors AC drain stress was found to be quasi-static in strong device saturation, while AC gate stress resulted in significantly enhanced degradation. In weak device saturation, both gate and drain pulsing resulted in early catastrophic device failure
Keywords :
failure analysis; hot carriers; insulated gate field effect transistors; life testing; semiconductor device testing; AC drain stress; AC gate stress; AC stress; AC/DC characterization; AC/DC measurements; AC/DC stress; DC stress; MOSFETs; NMOS transistors; NMOSFETs; PMOSFETs; catastrophic device failure; hot-carrier-induced degradation; hot-carrier-induced interfaced states; parameter shifts; pulsed drain stress; pulsed gate stress; Condition monitoring; Degradation; Hot carriers; Intrusion detection; MOS devices; Stress measurement; Threshold voltage;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/16.62305
Filename :
62305
Link To Document :
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