DocumentCode :
1551387
Title :
Mechanical considerations in the design of a micromechanical tuneable InP-based WDM filter
Author :
Greek, Staffan ; Gupta, Ram ; Hjort, Klas
Author_Institution :
Dept. of Mater. Sci., Uppsala Univ., Sweden
Volume :
8
Issue :
3
fYear :
1999
fDate :
9/1/1999 12:00:00 AM
Firstpage :
328
Lastpage :
334
Abstract :
A WDM photodetector for fiberoptic communication systems using a wavelengths around 1.55 μm has earlier been proposed as a tuneable Fabry-Perot interferometer micromachined on InP and integrated with a photodiode. The interferometer consists of a mirror suspended on beams and is tuned by electrostatic attraction. The size of the mirror is 30 μm×30 μm. In order to maintain the filter performance, the mirror must be kept so flat that the maximum bending deflection of the mirror surface is below 1 nm. Four alternative filter geometries are considered. A mathematical model describing the influence of system parameters, including tuning voltage and the sizes of the filter components, is developed. The upper and lower bounds of the natural frequency of mechanical vibrations are also calculated analytically. With finite-element analysis (FEA) the response to electrostatic actuation is calculated and the flatness of the mirror surface during tuning and at changed ambient temperature conditions is investigated. The dynamic behavior is also studied using modal analysis. The results of the analytic and FEA modeling are compared and found to agree
Keywords :
Fabry-Perot interferometers; III-V semiconductors; finite element analysis; indium compounds; interference filters; micro-optics; optical communication equipment; optical tuning; wavelength division multiplexing; 1.55 micron; Fabry-Perot interferometer; InP; design; electrostatic actuation; fiber optic communication; finite element analysis; mathematical model; mechanical vibration; micromachining; micromechanical tuneable WDM filter; microoptomechanical system; mirror; modal analysis; photodetector; photodiode; Fabry-Perot interferometers; Filters; Indium phosphide; Micromechanical devices; Mirrors; Optical fiber communication; Photodetectors; Photodiodes; Tuning; Wavelength division multiplexing;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/84.788637
Filename :
788637
Link To Document :
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