Title :
Fluxes of Charged Particles in Two-Chamber ICP Discharge in Oxygen
Author :
Bogdanov, Evgeny A. ; Chirtsov, Alexander S. ; Kudryavtsev, Anatoly A.
Author_Institution :
Fac. of Phys., St. Petersburg State Univ., St. Petersburg, Russia
Abstract :
This article presents a nontrivial behavior of charged particles fluxes in electronegative 2-D plasmas. It is shown that in 2-D multicomponent plasmas, the ambipolarity of fluxes is violated, i.e., the algebraic sum of all fluxes turned out nonzero. It also turned out that the total current streamlines are closed circuit, which means that the current in plasma is a vortex.
Keywords :
discharges (electric); plasma flow; plasma simulation; plasma sources; plasma transport processes; vortices; 2D multicomponent plasmas; charged particle flux; charged particle nontrivial behavior; electronegative 2D plasmas; flux ambipolarity; plasma vortex current; total current streamlines; two chamber oxygen ICP discharge; Color; Current; Discharges; Ions; Mathematical model; Plasmas; Radio frequency; Plasmas; plasma properties; plasma transport processes;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2011.2155679
