DocumentCode
1551722
Title
Fluxes of Charged Particles in Two-Chamber ICP Discharge in Oxygen
Author
Bogdanov, Evgeny A. ; Chirtsov, Alexander S. ; Kudryavtsev, Anatoly A.
Author_Institution
Fac. of Phys., St. Petersburg State Univ., St. Petersburg, Russia
Volume
39
Issue
11
fYear
2011
Firstpage
2562
Lastpage
2563
Abstract
This article presents a nontrivial behavior of charged particles fluxes in electronegative 2-D plasmas. It is shown that in 2-D multicomponent plasmas, the ambipolarity of fluxes is violated, i.e., the algebraic sum of all fluxes turned out nonzero. It also turned out that the total current streamlines are closed circuit, which means that the current in plasma is a vortex.
Keywords
discharges (electric); plasma flow; plasma simulation; plasma sources; plasma transport processes; vortices; 2D multicomponent plasmas; charged particle flux; charged particle nontrivial behavior; electronegative 2D plasmas; flux ambipolarity; plasma vortex current; total current streamlines; two chamber oxygen ICP discharge; Color; Current; Discharges; Ions; Mathematical model; Plasmas; Radio frequency; Plasmas; plasma properties; plasma transport processes;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2011.2155679
Filename
5872053
Link To Document