DocumentCode
1551729
Title
Introduction to the Special Section on Microelectromechanical Systems in Industrial Environments
Author
Luque, Antonio ; Mrad, Ridha Ben
Author_Institution
Department of Electronics Engineering, University of Seville, Seville, Spain
Volume
59
Issue
12
fYear
2012
Firstpage
4853
Lastpage
4854
Abstract
The 11 papers in this special section provide a comprehensive review of the industrial applications of microelectromechanical systems (MEMS).
Keywords
Microelectromechanical devices; Microelectromechanical systems; Special issues and sections;
fLanguage
English
Journal_Title
Industrial Electronics, IEEE Transactions on
Publisher
ieee
ISSN
0278-0046
Type
jour
DOI
10.1109/TIE.2012.2197312
Filename
6230698
Link To Document