Title :
Operation of surface-tension self-assembled 3D micro-optomechanical torsion mirror scanner
Author_Institution :
Dept. of Electr. & Electron. Eng., Imperial Coll. of Sci., Technol. & Med., London, UK
fDate :
7/8/1999 12:00:00 AM
Abstract :
The operation of an electrostatically-driven 3D micro-optomechanical resonant torsion mirror scanner is described. The device is fabricated in bonded silicon-on-insulator and self-assembled by out-of plane rotation powered by a surface tension torque obtained by photoresist melting. A scan angle of 16/spl deg/ is obtained at a drive frequency of 2.6 kHz using a voltage of 175 V.
Keywords :
surface tension; 175 V; 2.6 kHz; 3D micro-optomechanical resonant torsion mirror scanner; drive frequency; electrostatically-driven; n bonded silicon-on-insulator; out-of plane rotation; photoresist melting; scan angle; self-assembled; surface tension torque; surface-tension self-assembled 3D micro-optomechanical torsion mirror scanner;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19990833
