DocumentCode
1552457
Title
Modeling and optimal design of piezoelectric cantilever microactuators
Author
DeVoe, Don L. ; Pisano, Albert P.
Author_Institution
Dept. of Mech. Eng., Maryland Univ., College Park, MD, USA
Volume
6
Issue
3
fYear
1997
fDate
9/1/1997 12:00:00 AM
Firstpage
266
Lastpage
270
Abstract
A novel model is described for predicting the static behavior of a piezoelectric cantilever actuator with an arbitrary configuration of elastic and piezoelectric layers. The model is compared to deflection measurements obtained from 500-μm-long ZnO cantilever actuators fabricated by surface micromachining. Modeled and experimental results demonstrate the utility of the model for optimizing device design. A discussion of design considerations and optimization of device performance is presented
Keywords
microactuators; piezoelectric actuators; ZnO; model; multimorph; optimal device design; piezoelectric cantilever microactuator; static deflection; surface micromachining; Bonding; Capacitive sensors; Design optimization; Mechanical engineering; Microactuators; Piezoelectric actuators; Piezoelectric films; Predictive models; Structural beams; Zinc oxide;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/84.623116
Filename
623116
Link To Document