DocumentCode
1552491
Title
Correction To "M-test: A Test Chip For Mems Material Property Measurement Using Electrostatically Actuated Test Structures"
Author
Osterberg, Peter M. ; Senturia, Stephen D.
Author_Institution
University of Portland, Portland, OR 97203 USA
Volume
6
Issue
3
fYear
1997
Firstpage
286
Lastpage
286
Keywords
Biographies; Electrostatic measurements; Laboratories; Material properties; Materials testing; Micromechanical devices; Physics; Semiconductor device measurement;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.1997.623119
Filename
623119
Link To Document