RCE photodetectors based on VCSEL structures

Author

Knodl, T. ; Choy, H.K.H. ; Pan, J.L. ; King, R. ; Jager, R. ; Lullo, G. ; Ahadian, J.F. ; Ram, R.J. ; Fonstad, C.G., Jr. ; Ebeling, K.J.

Author_Institution

Dept. of Optoelectron., Ulm Univ., Germany

Volume

11

Issue

10

fYear

1999

Firstpage

1289

Lastpage

1291

Abstract

We have fabricated top illuminated resonant cavity enhanced (RCE) detectors by partially removing top-mirror pairs of a vertical-cavity surface-emitting laser (VCSEL) structure by etching. The observed maximum quantum efficiency is 73% with a spectral full-width at half-maximum (FWHM) of about 1.7 nm. This particular RCE detector was fabricated by etching away 8 top-mirror pairs of a VCSEL structure, with 15.5 top-mirror pairs remaining. Spectral FWHMs as wide as 6.5 nm, with a peak efficiency of 36%, have been measured in the case of 4.5 top mirrors remaining. An increase in the 3-dB detector bandwidth up to 2.8 GHz is observed by reducing the active device diameter from 90 to 20 μm.

Keywords

laser cavity resonators; molecular beam epitaxial growth; optical fabrication; optical resonators; photodetectors; semiconductor growth; surface emitting lasers; 2.8 GHz; 36 percent; 73 percent; 90 to 20 mum; RCE detector; RCE photodetectors; VCSEL structure; VCSEL structures; active device diameter; etching; observed maximum quantum efficiency; peak efficiency; spectral full-width at half-maximum; top illuminated resonant cavity enhanced detectors; top-mirror pairs; vertical-cavity surface-emitting laser; Bandwidth; Detectors; Etching; Fabrication; Mirrors; Molecular beam epitaxial growth; Optical sensors; Photodetectors; Resonance; Vertical cavity surface emitting lasers;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.789720

Filename

789720