RF MEMS switches and switch circuits

Author

Rebeiz, Gabriel M. ; Muldavin, Jeremy B.

Author_Institution

Michigan Univ., Ann Arbor, MI, USA

Volume

2

Issue

4

fYear

2001

fDate

12/1/2001 12:00:00 AM

Firstpage

59

Lastpage

71

Abstract

MEMS switches are devices that use mechanical movement to achieve a short circuit or an open circuit in the RF transmission line. RF MEMS switches are the specific micromechanical switches that are designed to operate at RF-to-millimeter-wave frequencies (0.1 to 100 GHz). The forces required for the mechanical movement can be obtained using electrostatic, magnetostatic, piezoelectric, or thermal designs. To date, only electrostatic-type switches have been demonstrated at 0.1-100 GHz with high reliability (100 million to 10 billion cycles) and wafer-scale manufacturing techniques. It is for this reason that this article will concentrate on electrostatic switches

Keywords

electrostatic actuators; semiconductor device reliability; semiconductor switches; wafer-scale integration; 0.1 to 100 GHz; RF MEMS switches; RF transmission line; electrostatic-type switches; micromechanical switches; reliability; switch circuits; wafer-scale manufacturing techniques; Distributed parameter circuits; Electrostatics; Magnetostatics; Micromechanical devices; Microswitches; Radio frequency; Radiofrequency microelectromechanical systems; Switches; Switching circuits; Thermal force;

fLanguage

English

Journal_Title

Microwave Magazine, IEEE

Publisher

ieee

ISSN

1527-3342

Type

jour

DOI

10.1109/6668.969936

Filename

969936