Title :
New methods, mechanisms and models of vapor deposition, vol. 616 [Book Reviews]
Keywords :
Atomic layer deposition; Book reviews; Chemical vapor deposition; Coatings; High temperature superconductors; Polymers; Springs; Sputtering; Superconducting thin films; Thermal degradation;
Journal_Title :
Electrical Insulation Magazine, IEEE
DOI :
10.1109/MEI.2001.969952
