DocumentCode
1552954
Title
Increased-area oxidised single-fundamental mode VCSEL with self-aligned shallow etched surface relief
Author
Unold, H.J. ; Grabherr, M. ; Eberhard, F. ; Mederer, F. ; Jager, R. ; Riedl, M. ; Ebeling, K.J.
Author_Institution
Dept. of Optoelectron., Ulm Univ., Germany
Volume
35
Issue
16
fYear
1999
fDate
8/5/1999 12:00:00 AM
Firstpage
1340
Lastpage
1341
Abstract
A self-aligning fabrication process is presented for enhancing the fundamental singlemode emission of selectively oxidised vertical cavity surface emitting lasers using a surface relief etching technique. The mechanism underlying the increase in threshold gain due to the use of a shallow surface relief is described and the results obtained for a 7 μm device at 850 nm are presented
Keywords
etching; laser modes; oxidation; surface emitting lasers; 7 micron; 850 nm; fundamental singlemode emission; selectively oxidised vertical cavity surface emitting lasers; self-aligned shallow etched surface relief; single-fundamental mode VCSEL; threshold gain;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19990952
Filename
790039
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