Longitudinal mode perturbation of laser diodes with dry etched total internal reflector

Author

Jung-Hwan Choi ; Kwon, Young-shin

Author_Institution

DRAM Design4, Kyungki-Do, South Korea

Volume

9

Issue

10

fYear

1997

Firstpage

1310

Lastpage

1312

Abstract

The spectral characteristics of rooftop reflector (RTR) laser diode and serpentine shaped laser diode (SSLD) are presented. Lasers are fabricated using two step Cl/sub 2/-based reactive ion beam etching (RIBE). It is found that the spectra of RTR laser and SSLD are very different from those of Fabry-Perot cavity lasers. Also a Y-branch optical waveguide with total internal reflector (TIR) mirror was fabricated to measure backward reflection from the TIR mirror. The results suggest that the spectre of lasers with TIR mirrors have a strong longitudinal mode selectivity due to the scattering and reflection at the TIR mirror.

Keywords

laser cavity resonators; laser mirrors; laser modes; light scattering; optical fabrication; quantum well lasers; sputter etching; Al/sub 0.3/Ga/sub 0.7/As-Al/sub 0.1/Ga/sub 0.9/As; RTR LD; SSLD; Y-branch optical waveguide; backward reflection; dry etched total internal reflector; fabrication; laser diodes; longitudinal mode perturbation; rooftop reflector; scattering; serpentine shaped laser diode; spectra; spectral characteristics; strong longitudinal mode selectivity; total internal reflector mirror; two step Cl/sub 2/-based reactive ion beam etching; Diode lasers; Dry etching; Fabry-Perot; Ion beams; Laser modes; Mirrors; Optical reflection; Optical scattering; Optical waveguides; Waveguide lasers;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.623246

Filename

623246