DocumentCode :
1553815
Title :
Longitudinal mode perturbation of laser diodes with dry etched total internal reflector
Author :
Jung-Hwan Choi ; Kwon, Young-shin
Author_Institution :
DRAM Design4, Kyungki-Do, South Korea
Volume :
9
Issue :
10
fYear :
1997
Firstpage :
1310
Lastpage :
1312
Abstract :
The spectral characteristics of rooftop reflector (RTR) laser diode and serpentine shaped laser diode (SSLD) are presented. Lasers are fabricated using two step Cl/sub 2/-based reactive ion beam etching (RIBE). It is found that the spectra of RTR laser and SSLD are very different from those of Fabry-Perot cavity lasers. Also a Y-branch optical waveguide with total internal reflector (TIR) mirror was fabricated to measure backward reflection from the TIR mirror. The results suggest that the spectre of lasers with TIR mirrors have a strong longitudinal mode selectivity due to the scattering and reflection at the TIR mirror.
Keywords :
laser cavity resonators; laser mirrors; laser modes; light scattering; optical fabrication; quantum well lasers; sputter etching; Al/sub 0.3/Ga/sub 0.7/As-Al/sub 0.1/Ga/sub 0.9/As; RTR LD; SSLD; Y-branch optical waveguide; backward reflection; dry etched total internal reflector; fabrication; laser diodes; longitudinal mode perturbation; rooftop reflector; scattering; serpentine shaped laser diode; spectra; spectral characteristics; strong longitudinal mode selectivity; total internal reflector mirror; two step Cl/sub 2/-based reactive ion beam etching; Diode lasers; Dry etching; Fabry-Perot; Ion beams; Laser modes; Mirrors; Optical reflection; Optical scattering; Optical waveguides; Waveguide lasers;
fLanguage :
English
Journal_Title :
Photonics Technology Letters, IEEE
Publisher :
ieee
ISSN :
1041-1135
Type :
jour
DOI :
10.1109/68.623246
Filename :
623246
Link To Document :
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