Title :
Characteristic impedance extraction using calibration comparison
Author :
Vandenberghe, Servaas ; Schreurs, Dominique M M P ; Carchon, Geert ; Nauwelaers, Bart K J C ; De Raedt, Walter
Author_Institution :
Dept. of Electronics, Systems, Automation, & Technol., Katholieke Univ., Leuven, Belgium
fDate :
12/1/2001 12:00:00 AM
Abstract :
A robust line impedance identification method is presented in this paper. It determines the characteristic impedance of on-wafer thru-line-reflect (TLR) standards measured after an initial off-wafer line-reflect-match or TLR calibration. The only assumption made is that the obtained trans-wafer error boxes are a cascade of a symmetric probe-related disturbance and a change in reference impedance. The proposed method yields an unbiased estimate of the complex characteristic impedance. Results from coplanar lines on a medium resistivity silicon substrate support the made assumption
Keywords :
calibration; coplanar transmission lines; electric impedance measurement; measurement errors; microwave measurement; Si; characteristic impedance; coplanar line; line impedance identification; medium resistivity silicon substrate; off-wafer TLR calibration; off-wafer line-reflect-match calibration; on-wafer thru-line-reflect measurement; parameter extraction; reference impedance; trans-wafer error box; Calibration; Conductivity; Electronics packaging; Impedance measurement; Measurement standards; Robustness; Silicon; Voltage; Waveguide junctions; Yield estimation;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
