Title :
Hot Spot Formation in Microwave Plasma CVD Diamond Synthesis
Author :
Hemawan, Kadek W. ; Yan, Chih S. ; Liang, Qi ; Lai, Joseph ; Meng, Yufei ; Krasnicki, Szczesny ; Mao, Ho K. ; Hemley, Russell J.
Author_Institution :
Geophys. Lab., Carnegie Instn. of Washington, Washington, DC, USA
Abstract :
Plasma-substrate interactions in diamond synthesis via microwave plasma-assisted chemical vapor deposition (CVD) are an important issue in CVD reactor optimization. The hot spot formation observed during single-crystal diamond synthesis in 2.45-GHz cylindrical cavity reactors is examined after long-run deposition.
Keywords :
diamond; plasma CVD; plasma-wall interactions; C; CVD; cylindrical cavity reactors; frequency 2.45 GHz; hot spot formation; microwave plasma-assisted chemical vapor deposition; plasma-substrate interactions; single-crystal diamond; Diamond-like carbon; Electromagnetic heating; Inductors; Microwave imaging; Microwave theory and techniques; Plasmas; Substrates; Chemical vapor deposition (CVD) diamond; hot spot; microwave plasma;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2011.2157531
