• DocumentCode
    1554427
  • Title

    Mach-Zehnder filter using multiple Si waveguide structure sections for width error tolerance

  • Author

    Okayama, Hideaki ; Shimura, Daisuke ; Takahashi, Hiroki ; Seki, Morihiro ; Toyama, Munehiro ; Sano, Tomomi ; Yaegashi, Hiroki ; Horikawa, Tsuyoshi ; Sasaki, Hiromu

  • Author_Institution
    Inst. for Photonics-Electron. Convergence Syst. Technol. (PECST), Japan
  • Volume
    48
  • Issue
    14
  • fYear
    2012
  • Firstpage
    869
  • Lastpage
    870
  • Abstract
    A Mach-Zehnder interferometer wavelength filter using multiple Si waveguide structure sections showing waveguide width error tolerance is reported. Analytical calculation based on the finite element method shows that the width sensitivity is reduced to 1/30 that of the conventional device. The fabricated device exhibited width sensitivity of dλ/dW = -0.09-0.05 and all the devices on different chips showed identical wavelength response for 1500-1600 nm wavelengths.
  • Keywords
    filters; interferometers; waveguides; Mach-Zehnder interferometer wavelength filter; multiple Si waveguide structure sections; width error tolerance;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el.2012.1914
  • Filename
    6235172
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1554427