• DocumentCode
    1554585
  • Title

    Focused ion beam tuning of in-plane vibrating micromechanical resonators

  • Author

    Syms, R.R.A. ; Moore, D.F.

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Imperial Coll. of Sci., Technol. & Med., London, UK
  • Volume
    35
  • Issue
    15
  • fYear
    1999
  • fDate
    7/22/1999 12:00:00 AM
  • Firstpage
    1277
  • Lastpage
    1278
  • Abstract
    Strategies for permanently tuning the resonant frequency of in-plane micromechanical resonators are compared. It is shown that tuning of the suspension stiffness may have advantages compared with tuning of the mass. Iterative frequency tuning of laterally resonant electrostatic comb-drive microactuators by focused ion beam machining is demonstrated
  • Keywords
    electrostatic actuators; focused ion beam technology; micromachining; micromechanical resonators; tuning; vibrations; electrostatic comb drive microactuator; focused ion beam machining; focused ion beam tuning; in-plane vibration; iterative frequency tuning; mass; micromechanical resonator; resonant frequency; suspension stiffness;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19990855
  • Filename
    790798
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1554585