Title :
Focused ion beam tuning of in-plane vibrating micromechanical resonators
Author :
Syms, R.R.A. ; Moore, D.F.
Author_Institution :
Dept. of Electr. & Electron. Eng., Imperial Coll. of Sci., Technol. & Med., London, UK
fDate :
7/22/1999 12:00:00 AM
Abstract :
Strategies for permanently tuning the resonant frequency of in-plane micromechanical resonators are compared. It is shown that tuning of the suspension stiffness may have advantages compared with tuning of the mass. Iterative frequency tuning of laterally resonant electrostatic comb-drive microactuators by focused ion beam machining is demonstrated
Keywords :
electrostatic actuators; focused ion beam technology; micromachining; micromechanical resonators; tuning; vibrations; electrostatic comb drive microactuator; focused ion beam machining; focused ion beam tuning; in-plane vibration; iterative frequency tuning; mass; micromechanical resonator; resonant frequency; suspension stiffness;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19990855
