Title :
Finite element simulation of surface acoustic waves excited in barium-strontium titanate films fabricated on magnesium oxide substrate by interdigital transducers
Author :
Timoshenko, P.E. ; Kalinchuk, V.V. ; Shirokov, V.B. ; Levi, M.O. ; Pan´kin, A.V. ; Donets, A.V.
Author_Institution :
Southern Fed. Univ., Rostov-on-Don, Russia
Abstract :
In this paper, we present study on surface acoustic waves excited in barium - strontium titanate films fabricated on magnesium oxide substrate by interdigital transducers. The surface acoustic waves propagation was simulated by using COMSOL Multiphysics™. The presence of bias, since the oscillations are not considered as sagittal polarized, is the principal difference between considered problem and standard problem that implemented in many finite element packages. The calculations of mechanic displacement and electric field potential for the first Eigen frequencies for different planes are shown. The methods of modeling in COMSOL Multiphysics™ software package are presented in this paper can be used for calculations of other systems that have different complex configuration.
Keywords :
acoustic wave propagation; barium compounds; eigenvalues and eigenfunctions; finite element analysis; oscillations; surface acoustic waves; thin films; BaTiO3; COMSOL Multiphysics software package; MgO; barium-strontium titanate films; eigenfrequencies; electric field potential calculation; finite element simulation; interdigital transducers; magnesium oxide substrate; mechanic displacement calculation; oscillations; surface acoustic wave propagation; Films; Finite element analysis; Magnesium oxide; Substrates; Surface acoustic waves; Titanium compounds;
Conference_Titel :
Actual Problems of Electron Devices Engineering (APEDE), 2014 International Conference on
Conference_Location :
Saratov
Print_ISBN :
978-1-4799-3437-9
DOI :
10.1109/APEDE.2014.6958762