• DocumentCode
    1555736
  • Title

    Fabrication of low loss, waveguide grating filters using electron beam lithography

  • Author

    Millar, P. ; Harkins, R. ; Aitchison, J.S.

  • Author_Institution
    Dept. of Electron. & Electr. Eng., Glasgow Univ.
  • Volume
    33
  • Issue
    12
  • fYear
    1997
  • fDate
    6/5/1997 12:00:00 AM
  • Firstpage
    1031
  • Lastpage
    1032
  • Abstract
    A single step, electron beam writing process for the fabrication of low loss grating filters on AlGaAs rib waveguides is described. The technique allows both waveguide and grating to be defined in a single processing step. Linear loss measurements are presented which show that the presence of the grating has no significant effect on the throughput of the waveguides
  • Keywords
    III-V semiconductors; aluminium compounds; diffraction gratings; electron beam lithography; gallium arsenide; integrated optics; interference filters; optical fabrication; optical waveguide filters; optical waveguides; rib waveguides; AlGaAs; AlGaAs rib waveguides; electron beam lithography; fabrication; low loss grating filters; single step EB writing process; waveguide grating filters;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19970712
  • Filename
    588420
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1555736