Title :
A CAD coupled laser beam test system for digital circuit failure analysis
Author :
Fritz, Joachim ; Lackmann, Rainer
Author_Institution :
Fraunhofer Inst. of Microelectron. Circuits & Syst., Duisburg, West Germany
fDate :
9/1/1990 12:00:00 AM
Abstract :
An automated contactless testing system that consists of a laser scanning microscope (LSM) coupled with a CAD layout database is described. Logic state detection and automated failure analysis in CMOS circuits can be done without the need of vacuum, and with a minimum of circuit environment preparation. The coupling of the LSM and the CAD layout database leads to automated node location, and minimizes the failure search because it enables the user to backtrace signal interconnections inside the circuit during the local test session
Keywords :
CMOS integrated circuits; automatic testing; circuit CAD; failure analysis; integrated circuit testing; logic testing; measurement by laser beam; CAD layout database; CMOS circuits; automated contactless testing system; automated node location; circuit environment preparation; digital circuit failure analysis; failure search; laser beam test system; laser scanning microscope; local test session; logic state detection; signal interconnections; Automatic testing; CMOS logic circuits; Circuit testing; Coupling circuits; Databases; Digital circuits; Laser beams; Microscopy; Optical coupling; System testing;
Journal_Title :
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
