• DocumentCode
    1556006
  • Title

    Cylindrical Grating Projection by Single-Shot Normal Exposure of a Radial Phase Mask

  • Author

    Tonchev, Svetlen ; Jourlin, Yves ; Reynaud, Stéphanie ; Parriaux, Olivier

  • Author_Institution
    Inst. of Solid State Phys., Sofia, Bulgaria
  • Volume
    4
  • Issue
    4
  • fYear
    2012
  • Firstpage
    1170
  • Lastpage
    1177
  • Abstract
    A periodic grating is defined at the photoresist-coated wall of a circular cylinder with an integer number of particularly long grooves parallel to the generic lines by the holistic exposure of a radial phase mask to a normally incident collimated laser beam. The single-shot projected element corresponds to the inner grating of a high-resolution miniature shaft encoder.
  • Keywords
    diffraction gratings; laser materials processing; masks; optical fabrication; photoresists; collimated laser beam; cylindrical grating projection; high resolution miniature shaft encoder; long grooves; periodic grating; photoresist coated wall; radial phase mask; single shot normal exposure; Diffraction; Diffraction gratings; Gratings; Indexes; Laser beams; Shafts; Photolithography; cylindrical gratings; phase masks;
  • fLanguage
    English
  • Journal_Title
    Photonics Journal, IEEE
  • Publisher
    ieee
  • ISSN
    1943-0655
  • Type

    jour

  • DOI
    10.1109/JPHOT.2012.2207096
  • Filename
    6237428