Ultracompact corner-mirrors and T-branches in silicon-on-insulator

Author

Ahmad, R.U. ; Pizzuto, F. ; Camarda, G.S. ; Espinola, R.L. ; Rao, H. ; Osgood, R.M., Jr.

Author_Institution

Microelectron. Sci. Labs., Columbia Univ., New York, NY, USA

Volume

14

Issue

1

fYear

2002

Firstpage

65

Lastpage

67

Abstract

In this letter, we have designed and fabricated low-loss ultrasmall corner mirrors and T-branches on thin silicon-on-insulator material system. The measured performance of the devices agrees with simulations using finite-difference time-domain calculations. These devices demonstrate the potential of this high-refractive-index-contrast material system for high-density planar optical integrated circuits.

Keywords

finite difference time-domain analysis; integrated optics; micro-optics; mirrors; optical fabrication; optical waveguide components; silicon-on-insulator; SOI-based integrated optics; Si-SiO/sub 2/; T-branches; Unibond technique; beam propagation method; double mirrors; finite-difference time-domain calculations; high-density planar optical integrated circuits; high-refractive-index-contrast material system; low-loss ultrasmall corner mirrors; power splitters; silicon-on-insulator; wafer-bonded SOI structure; Circuit simulation; Finite difference methods; Integrated circuit measurements; Integrated optics; Mirrors; Optical devices; Optical materials; Photonic integrated circuits; Silicon on insulator technology; Time domain analysis;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.974163

Filename

974163