Title :
Fabrication of high density multichip modules
Author_Institution :
Polycon, Ventura, CA, USA
fDate :
9/1/1990 12:00:00 AM
Abstract :
The fabrication steps necessary to build high-density multichip module substrates are reviewed, and some of the complex process decisions needed to obtain a system which will eventually be produced in high volumes are discussed. Thin-film-based high-density multichip modules are necessary to achieve satisfactory performance in new electronic designs. Substrates built with vacuum-deposited metal and polymeric insulators have evolved in much more complex structures than traditional thin film hybrid
Keywords :
metallisation; modules; organic insulating materials; packaging; electronic designs; high density multichip modules; multichip module substrates; polymeric insulators; process decisions; vacuum-deposited metal; Aerospace electronics; Fabrication; Integrated circuit interconnections; Metallization; Multichip modules; Nonhomogeneous media; Plastic insulation; Polymer films; Space technology; Substrates;
Journal_Title :
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on