DocumentCode
1556662
Title
Investigation of a low-cost broad-range silicon-based temperature sensor
Author
Qiu, Helen Jiang ; Maclay, G.Jordan
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Illinois Univ., Chicago, IL, USA
Volume
35
Issue
5
fYear
1999
Firstpage
1178
Lastpage
1183
Abstract
This paper documents research into a new type of low-cost silicon-based broad-range (25°C-500°C) temperature sensor targeted for use in household appliances. Conventional temperature sensing devices, such as platinum thermistors, are expensive to apply to cost-sensitive appliance markets. The data and manufacturing process presented in this paper suggest doped silicon sensors are a feasible lower cost alternative to their platinum counterparts
Keywords
copper; domestic appliances; elemental semiconductors; microsensors; semiconductor doping; silicon; temperature sensors; 25 to 500 C; Si:Cu; broad-range silicon-based temperature sensor; copper-doped silicon sensor; household appliances; low-cost; manufacturing process; microsensors; Conductivity; Fabrication; Home appliances; Packaging; Platinum; Silicon; Temperature dependence; Temperature distribution; Temperature sensors; Thermistors;
fLanguage
English
Journal_Title
Industry Applications, IEEE Transactions on
Publisher
ieee
ISSN
0093-9994
Type
jour
DOI
10.1109/28.793382
Filename
793382
Link To Document