Title :
Numerical Simulations of Nanodusty RF Plasmas
Author :
Agarwal, Pulkit ; Girshick, Steven L.
Author_Institution :
Dept. of Mech. Eng., Univ. of Minnesota, Minneapolis, MN, USA
Abstract :
Results are presented of numerical simulations of the spatiotemporal evolution of nanoparticles that nucleate and grow in a nonthermal radio-frequency plasma. This paper highlights the effects of several operating parameters.
Keywords :
dusty plasmas; nanoparticles; numerical analysis; plasma collision processes; plasma simulation; nanodusty RF plasma numerical simulations; nanoparticle growth; nanoparticle nucleation; nanoparticle spatiotemporal evolution; nonthermal radiofrequency plasma; Electrodes; Mathematical model; Nanoparticles; Numerical simulation; Plasma temperature; Radio frequency; Dusty plasma; numerical simulation;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2011.2157945
